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Igor Krylov
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Experimental evidence for the correlation between the weak inversion hump and near midgap states in dielectric/InGaAs interfaces
I Krylov, L Kornblum, A Gavrilov, D Ritter, M Eizenberg
Applied Physics Letters 100 (17), 2012
562012
The physical origin of dispersion in accumulation in InGaAs based metal oxide semiconductor gate stacks
I Krylov, D Ritter, M Eizenberg
Journal of Applied Physics 117 (17), 2015
452015
Indium outdiffusion and leakage degradation in metal/Al2O3/In0. 53Ga0. 47As capacitors
I Krylov, A Gavrilov, M Eizenberg, D Ritter
Applied Physics Letters 103 (5), 2013
332013
Correlation between Ga-O signature and midgap states at the Al2O3/In0. 53Ga0. 47As interface
I Krylov, A Gavrilov, M Eizenberg, D Ritter
Applied Physics Letters 101 (6), 2012
332012
Indium out-diffusion in Al2O3/InGaAs stacks during anneal at different ambient conditions
I Krylov, R Winter, D Ritter, M Eizenberg
Applied Physics Letters 104 (24), 2014
282014
Obtaining low resistivity (∼ 100 μΩ cm) TiN films by plasma enhanced atomic layer deposition using a metalorganic precursor
I Krylov, E Zoubenko, K Weinfeld, Y Kauffmann, X Xu, D Ritter, ...
Journal of Vacuum Science & Technology A 36 (5), 2018
242018
Ferroelectricity of as-deposited HZO fabricated by plasma-enhanced atomic layer deposition at 300° C by inserting TiO2 interlayers
Y Qi, X Xu, I Krylov, M Eizenberg
Applied Physics Letters 118 (3), 2021
232021
Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
I Krylov, X Xu, Y Qi, K Weinfeld, V Korchnoy, M Eizenberg, D Ritter
Journal of Vacuum Science & Technology A 37 (6), 2019
182019
Role of reactive gas on the structure and properties of titanium nitride films grown by plasma enhanced atomic layer deposition
I Krylov, X Xu, E Zoubenko, K Weinfeld, S Boyeras, F Palumbo, ...
Journal of Vacuum Science & Technology A 36 (6), 2018
162018
The effect of post oxide deposition annealing on the effective work function in metal/Al2O3/InGaAs gate stack
R Winter, I Krylov, J Ahn, PC McIntyre, M Eizenberg
Applied Physics Letters 104 (20), 2014
162014
A comparison between HfO2/Al2O3 nano-laminates and ternary HfxAlyO compound as the dielectric material in InGaAs based metal-oxide-semiconductor (MOS) capacitors
I Krylov, B Pokroy, M Eizenberg, D Ritter
Journal of Applied Physics 120 (12), 2016
152016
Understanding leakage currents through Al2O3 on SrTiO3
D Miron, I Krylov, M Baskin, E Yalon, L Kornblum
Journal of Applied Physics 126 (18), 2019
142019
Properties of conductive nitride films prepared by plasma enhanced atomic layer deposition using quartz and sapphire plasma sources
I Krylov, X Xu, K Weinfeld, V Korchnoy, D Ritter, M Eizenberg
Journal of Vacuum Science & Technology A 37 (1), 2019
142019
A comparative study of AlN and Al2O3 based gate stacks grown by atomic layer deposition on InGaAs
I Krylov, B Pokroy, D Ritter, M Eizenberg
Journal of Applied Physics 119 (8), 2016
132016
The role of the substrate on the dispersion in accumulation in III-V compound semiconductor based metal-oxide-semiconductor gate stacks
I Krylov, D Ritter, M Eizenberg
Applied Physics Letters 107 (10), 2015
132015
Impact of bilayered oxide stacks on the breakdown transients of metal–oxide–semiconductor devices: An experimental study
SM Pazos, S Boyeras Baldomá, FL Aguirre, I Krylov, M Eizenberg, ...
Journal of Applied Physics 127 (17), 2020
122020
HfxAlyO ternary dielectrics for InGaAs based metal-oxide-semiconductor capacitors
I Krylov, D Ritter, M Eizenberg
Journal of Applied Physics 122 (3), 2017
122017
Fermi level pinning in metal/Al2O3/InGaAs gate stack after post metallization annealing
R Winter, I Krylov, C Cytermann, K Tang, J Ahn, PC McIntyre, M Eizenberg
Journal of Applied Physics 118 (5), 2015
122015
Elimination of the weak inversion hump in Si3N4/InGaAs (001) gate stacks using an in situ NH3 pre-treatment
I Krylov, A Gavrilov, D Ritter, M Eizenberg
Applied Physics Letters 99 (20), 2011
112011
Role of temperature on structure and electrical properties of titanium nitride films grown by low pressure plasma enhanced atomic layer deposition
I Krylov, Y Qi, V Korchnoy, K Weinfeld, M Eizenberg, E Yalon
Journal of Vacuum Science & Technology A 38 (3), 2020
102020
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